Process chamber: 9 organic molecular sources, single glass size (100 * 100mm/0.5~0.7t), excellent uniformity (≤ ± 3%), effective control of deposition rate, precise substrate alignment with pins, transition chamber module, mechanical arm vacuum transfer sample;
Glove box: single station, containing rotary coating and UV curing;
Control system: menu style operation, data recording, parameter setting, fully OLED evaporation equipment OLED evaporation equipment OLED evaporation equipment automatic computer control, with interlocking.
OLED evaporation equipment
The evaporation rate of the equipment is stable.
Both organic matter and metal can evaporate stably; Especially, the unique design allows the device to effectively control the evaporation of metallic aluminum.
◆ The thickness uniformity of vapor deposition is excellent.